什么流程啊,RO前都没有换热器.还把换热器放在最后,这样会影响出水质量的.

EDI出水15M，为什么要加CO2把电阻率降到7M以下？

美国半导体水质标准：电阻率（２５℃）１８．２，内毒素０.２５ＥＵ／ＭＬ；ＴＯＣ１ppb;DO1ppb;Si0.5ppb

谢谢楼上的朋友

流程不错

ELECTRONIC GRADE WATER
American Society for Testing and Materials (ASTM) D5127-90
Standard Guide for Electronic Grade Water
Type E-I Type E-II Type E-III Type E IV
Resistivity, megohm-cm 18 17.5 12 0.5
minimum, (95% of time) (90% of time)
no less than no less than
17 16
SiO2 (total maximum, µg/L) 5 10 50 1000
Particle count per mL 1 3 10 100
Particle size limit, micron 0.1 0.5 1.0 10
Viable bacteria, maximum 1/1000 mL 10/1000 mL 10/mL 100/mL
Total organic carbon maximum,
µg/L
25 50 300 1000
Endotoxins1, EU/mL 0.03 0.25 N/A N/A
Copper maximum, µg/L 1 1 2 500
Chloride maximum, µg/L 1 1 10 1000
Nickel, mg/L 0.1 1 2 500
Nitrate maximum, mg/L 1 1 5 500
Phosphate maximum, mg/L 1 1 5 500
Potassium maximum, µg/L 2 2 5 500
Sodium maximum, µg/L 0.5 1 5 1000
Sulfate maximum, mg/L 1 1 5 500
Zinc maximum, µg/L 0.5 1 5 500
Note 1- Substance or by-products usually produced by gram-negative micro-organisms which
give a positive test for pyrogens.
Type E-I – Electronic Grade Water. This water will be classified as microelectronic water to be
used in the production of devices having line widths below 1.0 micrometer. It is intended that
this be the water of ultimate practical purity produced in large volumes and for the most critical
uses.
Type E-II – Electronic Grade Water. This water will be classified as microelectronic water to be
used in the production of devices having line widths below 5.0 micrometer. This water should
be adequate for producing most high-volume products which have dimensions above 1.0
micrometer and below 5.0 micrometers.
Type E-III – Electronic Grade Water. This grade of water may be classified as macroelectronic
water to be used in the production of devices having dimensions larger than 5.0 micrometers.
This grade may be used to produce larger components and some small components not
affected by trace amounts of impurities.
Type E-IV – Electronic Grade Water. Electronics-Grade Water may be classified as electroplating
water for non critical use and other general applications where the water is in constant contact
with the atmosphere because of tank storage.




这个是90的标准,跟99标准的内容没有多少差别,这个应该仅仅是参考,具体的水质标准还是要根据实际制程的要求来确定的

你一级RO就进EDI能行吗?原水水质不是很好的情况下，我个人建议不要用这样的工艺流程,
建议用二级RO的出水进EDI.QQ:35243720

一级RO无法去除CO2。但是，如果小水量系统，完全可以在RO前加软化器，然后在提高PH至8.3后进一级RO，这样的RO出水即可进入EDI，我的一个项目就是这样，效果还不错。大系统还是建议用2-RO。

to 6 FLOOR
你的流程我没有看，看到其他人的反馈，我谈谈我的看法
一级RO就进EDI这样的工艺流程比较冒风险，这样的流程的推出是有背景的，就是在多个EDI厂家竞争下，为诱惑业主的。在进水比较稳定，水质较好的时候，产水要求不要的情况下，可以采用。但是象晶原厂对水质的要求，以及连续供水的要求是分厂严格的，一般设计时都是采用比较保守的工艺流程，以求的供水稳定。

参考附件